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Configuration and dimensions of integrated sensor array of MEMS-b…
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MEMS pressure sensor array static pressure test. (a) Schematic diagram ...
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(a) 3D design of the tactile sensor array. (…
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(a) 3D design of the tactile sensor array. (b) Top: the 2 × 2 MEMS ...

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Schematic structure of the present MEMS sensor. | Download Scientific ...
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